Abstract：Nanoimprint lithography (NIL) is a replication-based mechanical process where a patterned template is pressed into a resist layer to transfer the pattern, and hence not limited by optical diffraction.
Following the Moore’s’ law, semiconductor manufacturing is continuously looking for smaller features. Photonic elements in augmented reality, 3D sensing and datacom/telecom are requiring stringent and complex patterns. In addition, biotechnology devices (biochips) that rely on biocompatible materials at the micro- or nano-scale further fueled the need of the nanostructure fabrication. There is a compelling enough reason to look for an alternative solution enabling nanostructures at lower cost.
Various lithography technologies are competing to deliver these improvements. NIL has developed as a most promising nanofabrication technique that has the potential to revolutionize the field of nanotechnology. Its high resolution with sub-10nm potential, cost-effective manufacturing compared to other high-resolution lithography techniques, scalability, versatility, and contributions to various applications make it a vital tool for advancing nanoscience and nanotechnology research.
Bio
Wang Nang Wang is currently the Chief Technology Advisor of LIXIN Technology Ltd, founder of QNIL and Gaia Bioscience and technology Ltd, holds a PhD degree of Physical Chemistry from Cambridge University. He has more than 50 published papers on compound semiconductors and more than 100 granted patents. He has worked as the Consultant for Materials Research Laboratory and EOS of ITRI, Taiwan, Professor and visiting Professor for Photonics Institute of NCTU, chief Scientist and co-founder of Arima Optoelectronics. Founder, CEO and CTO of Quantum Optech Inc (acquired by MRV Communications in 2000). Founder and CTO of NanoGaN (acquired by IQE in 2010), Chief Technical Advisor of IQE/NanoGaN. Professor of Physics, and Electronic and Electrical Engineering, University of Bath. Founder and CTO of Gaia Bioscience and Technology Ltd,. Emeritus professor of University of Bath and visiting professor of National Yang Ming and Chiao Tung University.
His research interest covers solid state lighting, full and supplemental lighting for plant and soft fruit growth, nanoimprint technology for DFB gratings/ silicon photonics/ biomimetic devices, VCSEL for facial ID, wide bandgap semiconductors, field emission devices, CVD diamond, carbon nanotubes, fullerene, III-V nitride materials, laser diodes, fabrication processes, HVPE reactor design , HVPE reactor modeling, HVPE GaN growth, MBE and MOCVD epitaxial growth (RIBER, VG Semicon, Aixtron, Veeco, Thomas Swan, Nippon Sanso), nano-structure III-V nitrides, nano-pendeo growth, thermal management for SSL, GaN on Si/SiC (HEMT, PV devices, LED, laser diodes, RF devices etc.,), semi-polar and non-polar GaN, optical wireless communications using LEDs, photonic quasi crystal related photonic devices, micro- and nano- bubble technologies, and nanoimprint technology for datacom, consumer electronics/photonics, and biomedical devices. He had held more than 5 EPSRC and European Framework grants total more than £16M. He is the academic representative in the missions-sponsored by DTI Technology Programme (UK DTI Global Watch Mission-solid state lighting technology) to carry out Japan mission-Nov 2005, visiting 12 companies and 3 universities; and USA mission-March 2006, visiting 11 companies and 2 universities. He is IIEEE Spectrum, Winner of Advanced Technology 2010 Award for Advanced Lasers using Nanotechnology. He is also involved in the new development of advanced plant light using large band width phosphors and flash type lighting to enhance the plant growth and to reduce fungi infection in soft fruit.
